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Slurry Supply System

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반도체장비 시스템전문기업 플러스이엔지(주)

2 in 1 'U' Type System
  • ORGANIC SUPPLY SYSTEM

    ▣ Specification

    · HMI: 19 inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 4~6 lpm · Dimension: 3,400*2,000*2,200mm 2ea, 1,000*850*2,200mm 1ea · Mixing Volume: 8~45ℓ · Mixing Accuracy: ± 0.05% · Mixing Recipe: Selective Use · Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000) · Supply Pressure: Max. 60 psi · Supply Flow: 2~15 lpm · Reliable Verification Method: Conductivity, Density, Concentration
2 in 1 'I' Type System

  • ▣ Specification

    · HMI: 19 inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 4~6 lpm · Dimension: 3,600*2,000*2,200mm 2ea · Mixing Volume: 8~45ℓ · Mixing Accuracy: ± 0.05% · Mixing Recipe: Selective Use · Supply Type: Centrifugal Pump(Levitronix BPS 4, 2,000, 4,000) · Supply Pressure: Max. 60 psi · Supply Flow: 2~15 lpm · Reliable Verification Method: Conductivity, Density, Concentration
    INORGANIC SUPPLY SYSTEM
3 in 1 System
  • ACQC(Automatic Cleaned Quick Coupler) Type

    ▣ Specification

    · HMI: 19 inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 4~6 lpm · Dimension: 3,700*1,900*2,300mm · Mixing Volume: 8~15ℓ · Mixing Accuracy: ± 0.05% · Mixing Recipe: Selective Use · Supply Type: Centrifugal Pump(Levitronix BPS 4) · Supply Pressure: Max. 60 psi · Supply Flow: 2~6 lpm · Reliable Verification Method: Conductivity, Density, Concentration