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Slurry Supply System

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반도체장비 시스템전문기업 플러스이엔지(주)

PUMP & TANK TYPE
  • PUMP & TANK TYPE

    ▣ Specification

    · HMI: 15 Inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK / Ethernet / RS 232-C · Capacity: 4~6 LPM · Mixing Volume: 8~45ℓ · Mixing Accuracy: ± 0.05% · Mixing Recipe: Selective Use · Supply Type: Centrifugal Pump(Levitronix社 BPS 4) · Supply Pressure: Max. 60 PSI · Supply Flow: 2~15 LPM · Reliable Verification Method: Conductivity, Density, Concentration
N2 & VESSEL TYPE
  • ▣ Specification

    · HMI: 15 Inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK / Ethernet / RS 232-C · Capacity: 4~6 LPM · Mixing Volume: 14ℓ · Mixing Accuracy: ± 0.05% · Mixing Recipe: Selective Use · Supply Type: N2 Pressure · Supply Pressure: Max. 60 PSI · Supply Flow: 2~10 LPM · Reliable Verification Method: Conductivity, Density, Concentration
    N2 & VESSEL TYPE