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Chemical Supply System

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반도체장비 시스템전문기업 플러스이엔지(주)

Organic Supply System
  • ORGANIC SUPPLY SYSTEM

    ▣ Specification

    · HMI: 15 Inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 10 lpm · Supply Type: N2 Pressure · Supply Pressure: Max. 60 psi · Supply Flow: 2~15 lpm
Inorganic Supply System

  • ▣ Specification

    · HMI: 15 Inch Touch PC · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 10 lpm · Supply Type: N2 Pressure · Supply Pressure: Max. 60 psi · Supply Flow: 2~15 lpm
    INORGANIC SUPPLY SYSTEM
ACQC(Automatic Cleaned Quick Coupler) Type
  • ACQC(Automatic Cleaned Quick Coupler) Type

    ▣ Specification

    · HMI: 12 Inch Touch Screen · Controller: PLC Base(OMRON) · Communication: CLK/Ethernet/RS 232-C · Capacity: 10 lpm · Supply Type: Pump(Bellows) · Supply Pressure: Max. 60 psi · Supply Flow: 20 lpm